MEMS SENSORS – DESIGN ---DISCOVER THE OPPORTUNITIES
Dr.Vimala Juliet A
Author / Research Scholar
About the Author(s)
Dr.A.Vimala Juliet started her career as a Research engineer trainee in FCRI and then switched over to teaching profession. She started her career as lecturer from June, 1994. Currently she is a Professor and the Head, Department of Electronics and Instrumentation Engineering, SRM Institute of Science and Technology, India. She has co-authored more than 100 papers in jou als and 3 books . She had guided 18 doctoral candidates, several Master's and Bachelors of Engineering projects and 7 scholars are currently doing under her guidance. She is a recipient of several awards, to mention a few an ISA Fellow in 2016.
Synopsis & Scholarly Abstract
In today's competitive world of technology, mankind is exploring every part of the nature that is possible. In the quest of exploration it has crossed every certain limit from the core of the earth to zenith. The proposed design is Capacitive micro machined ultrasonic transducers (CMUTs) have long been studied. Past research has shown that CMUTs indeed have remarkable features such as wide bandwidth and high efciency. This paper introduces an inclusion to the CMUT technology that uses the wafer-bonding technique to fabricate membranes on silicon. The CMUT is composed of a thin membrane supported by sidewalls over a thin cavity. Typically, many membranes are connected in parallel to form a single array. Here in this project, a noble approach of wafer bonding is used for the CMUT designing. A new way of structural designing is also tried out by providing a length of 550 μm, breadth of 400 μm and height of 51.525 μm. A DC bias is used which is only of 15V. All the designing and analysis for this project is carried on using the intelllisuite software.